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  • PI 小型六足位移台

  • PI 小型六足位移台

    PI的精密六足位移台以三十多年的设计和制造经验为基础。 PI拥有从压电到电磁的广泛驱动技术，只要与适当的传感器、软件和运动控制相结合，能够提供满足各种规格要求和安装情况的六足位移台。


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PI的精密六足位移台以三十多年的设计和制造经验为基础。 PI拥有从压电到电磁的广泛驱动技术，只要与适当的传感器、软件和运动控制相结合，能够提供满足各种规格要求和安装情况的六足位移台。



PI 小型六足位移台


型号H-815H-811.I2
H-811.x2IHPH-811.F2H-811.S2
图片


特点

  • 集成制动器，保障操作安全与高工艺可靠性

  • 配备绝对式编码器，无需回零即可获取位置数据，实现系统快速启动

  • 结构坚固耐用，可适应高负载循环工况，延长设备使用寿命

  • 长期稳定可靠，助力实现高生产效率

  • 紧凑式设计，便于集成安装

  • 采用插拔式电缆，布线管理便捷

  • 凭借优异设计与高品质元器件，实现高精度性能

  • 行程：±17mm / ±21°

  • 有效载荷：5kg

  • 重复精度：±0.06µm

  • 速度：20mm/s

  • 可提供真空型号

  • 行程：±17 毫米 /±21°

  • 有效载荷：2.5 kg

  • 重复精度：±0.1 μm

  • 速度：20 mm/s

  • 可拆卸磁板

  • 行程：

    ±17mm / ±16mm / ±6.5mm

  • 旋转范围：

    ±10° / ±10° / ±21°

  • 最小位移：

    0.2µm / 0.2µm / 0.08µm

  • 有效载荷：5kg

  • CIPA认证

  • 行程：±17mm / ±16mm / ±6.5mm

  • 旋转范围：±10° / ±10° / ±21°

  • 动态响应频率：30Hz（0.1°旋转范围内）


应用

  • 精密透镜对准与装调

  • 光学元器件及组件对准

  • 光子学与光学装配

  • 高精度元器件微装配

  • 工业装配流程

  • 激光材料加工中的精度控制

  • 全天候不间断运行自动化应用

  • 光子学与光学装配

  • 光子学与光学装配

  • 精密装配

  • 光纤对准

  • 光学精密校准

  • 运动仿真场景，例如测试相机或移动设备的图像防抖功能

  • 精密装配与计量

**详细参数见规格书

| Motion | Unit | Tolerance | P-561.3CD | P-561.3CL | P-562.3CD | P-562.3CL | P-563.3CD | P-563.3CL | P-561.3DD | | --- | --- | --- | --- | --- | --- | --- | --- | --- | --- | | Active axes |  |  | X | Y | Z | X | Y | Z | X | Y | Z | X | Y | Z | X | Y | Z | X | Y | Z | X | Y | Z | | Travel range in X | µm |  | 100 | 100 | 200 | 200 | 300 | 300 | 45 | | Travel range in Y | µm |  | 100 | 100 | 200 | 200 | 300 | 300 | 45 | | Travel range in Z | µm |  | 100 | 100 | 200 | 200 | 300 | 300 | 15 | | Travel range in X, open loop, at -20 to 120 V | µm | +20 % / -0 % | 150 | 150 | 300 | 300 | 340 | 340 | 58 | | Travel range in Y, open loop, at -20 to +120 V | µm | +20 % / -0 % | 150 | 150 | 300 | 300 | 340 | 340 | 58 | | Travel range in Z, open loop, at -20 to 120 V | µm | +20 % / -0 % | 150 | 150 | 300 | 300 | 340 | 340 | 18 | | Linearity error in X | % | Max. | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 | | Linearity error in Y | % | Max. | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 | | Linearity error in Z | % | Max. | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 | 0.08 | | Straightness error E_XZ | nm | Typ. | ±30 | ±30 | ±50 | ±50 | ±50 | ±50 | ±20 | | Straightness error E_YZ | nm | Typ. | ±30 | ±30 | ±50 | ±50 | ±50 | ±50 | ±20 | | Straightness error E_ZX (flat- ness) | nm | Typ. | ±15 | ±15 | ±20 | ±20 | ±25 | ±25 | ±10 | | Straightness error E_ZY (flat- ness) | nm | Typ. | ±15 | ±15 | ±20 | ±20 | ±25 | ±25 | ±10 | | Angular error E_AY (pitch) | µrad | Typ. | ±1 | ±1 | ±2 | ±2 | ±2 | ±2 | ±3 | | Angular error E_AZ | µrad | Typ. | ±15 | ±15 | ±20 | ±20 | ±25 | ±25 | ±3 | | Angular error E_BX (pitch) | µrad | Typ. | ±1 | ±1 | ±2 | ±2 | ±2 | ±2 | ±3 | | Angular error E_BZ | µrad | Typ. | ±15 | ±15 | ±20 | ±20 | ±25 | ±25 | ±3 | | Angular error E_CX (yaw) | µrad | Typ. | ±6 | ±6 | ±10 | ±10 | ±10 | ±10 | ±3 | | Angular error E_CY (yaw) | µrad | Typ. | ±6 | ±6 | ±10 | ±10 | ±10 | ±10 | ±3 || Motion | Unit | Tolerance | P-561.3CD | P-561.3CL | P-562.3CD | P-562.3CL | P-563.3CD | P-563.3CL | P-561.3DD | | --- | --- | --- | --- | --- | --- | --- | --- | --- | --- | | Active axes |  |  | X | Y | Z | X | Y | Z | X | Y | Z | X | Y | Z | X | Y | Z | X | Y | Z | X | Y | Z | | Travel range in X | µm |  | 100 | 100 | 200 | 200 | 300 | 300 | 45 | | Travel range in Y | µm |  | 100 | 100 | 200 | 200 | 300 | 300 | 45 | | Travel range in Z | µm |  | 100 | 100 | 200 | 200 | 300 | 300 | 15 | | Travel range in X, open loop, at -20 to 120 V | µm | +20 % / -0 % | 150 | 150 | 300 | 300 | 340 | 340 | 58 | | Travel range in Y, open loop, at -20 to +120 V | µm | +20 % / -0 % | 150 | 150 | 300 | 300 | 340 | 340 | 58 | | Travel range in Z, open loop, at -20 to 120 V | µm | +20 % / -0 % | 150 | 150 | 300 | 300 | 340 | 340 | 18 | | Linearity error in X | % | Max. | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 | | Linearity error in Y | % | Max. | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 | | Linearity error in Z | % | Max. | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 | 0.08 | | Straightness error E_XZ | nm | Typ. | ±30 | ±30 | ±50 | ±50 | ±50 | ±50 | ±20 | | Straightness error E_YZ | nm | Typ. | ±30 | ±30 | ±50 | ±50 | ±50 | ±50 | ±20 | | Straightness error E_ZX (flat- ness) | nm | Typ. | ±15 | ±15 | ±20 | ±20 | ±25 | ±25 | ±10 | | Straightness error E_ZY (flat- ness) | nm | Typ. | ±15 | ±15 | ±20 | ±20 | ±25 | ±25 | ±10 | | Angular error E_AY (pitch) | µrad | Typ. | ±1 | ±1 | ±2 | ±2 | ±2 | ±2 | ±3 | | Angular error E_AZ | µrad | Typ. | ±15 | ±15 | ±20 | ±20 | ±25 | ±25 | ±3 | | Angular error E_BX (pitch) | µrad | Typ. | ±1 | ±1 | ±2 | ±2 | ±2 | ±2 | ±3 | | Angular error E_BZ | µrad | Typ. | ±15 | ±15 | ±20 | ±20 | ±25 | ±25 | ±3 | | Angular error E_CX (yaw) | µrad | Typ. | ±6 | ±6 | ±10 | ±10 | ±10 | ±10 | ±3 | | Angular error E_CY (yaw) | µrad | Typ. | ±6 | ±6 | ±10 | ±10 | ±10 | ±10 | ±3 |