- 光学麦克风
- 光学麦克风
- 光学水听器
- 宽带超声源 TAE
- 超声激励激光器
- 工作站 LEAsys
- 过程监控 PM Bundle
- 特种光纤
- 空芯光子晶体光纤 HCPCF
- 保偏掺镱光纤
- 铒镱共掺光纤
- 掺钕光纤
- 掺铥光纤
- 铥钬共掺光纤
- 镀铝光纤
- 镀金光纤
- 紫外|可见光光纤
- 可见|红外光光纤
- 特种光纤定制
- 超快激光传输
- 空芯光子晶体光纤
- 超快空芯跳线
- 超快传能光缆
- 超快传能系统
- 光栅|晶体
- 啁啾布拉格光栅 CBG
- 反射式体布拉格光栅 RBG
- 透射式体布拉格光栅 TBG
- FBG
- CFBG 定制刻栅
- CLBO 晶体
- PP-LBGO 晶体
- 激光器
- 飞秒脉冲压缩器 Fastlas
- 超快激光模块 1030nm
- 高功率超快激光器 1030nm
- 多谱线激光器 250-950nm
- 深紫外激光器 193nm
- 单频全固态激光器 266nm
- 高重频固体激光器 447nm|671nm|1342nm
- 线偏振单频激光器 1550nm
- 激光二极管
- 增透膜镀膜激光二极管
- 探测器
- 高速光电探测器 145GHz
- 平衡光电探测器 100GHz
- 高功率光电探测器 65GHz
- 单光子雪崩二极管 SPAD
- 超导纳米线单光子探测器
- 微焦点X射线源
- 位移台
- 精密六足位移台
- 纳米定位平台
- 偏摆台
- 线性平台
- 太赫兹
- 相机
- 半导体制冷器
- 单层 TEC
- 双层 TEC
- 多层 TEC
- 过程监控
- 激光工艺软件
- 激光加工质量监测
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小型六足位移台
PI的精密六足位移台以三十多年的设计和制造经验为基础。 PI拥有从压电到电磁的广泛驱动技术，只要与适当的传感器、软件和运动控制相结合，能够提供满足各种规格要求和安装情况的六足位移台。
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PI的精密六足位移台以三十多年的设计和制造经验为基础。 PI拥有从压电到电磁的广泛驱动技术，只要与适当的传感器、软件和运动控制相结合，能够提供满足各种规格要求和安装情况的六足位移台。
小型六足位移台
| 型号 | H-815 | H-811.I2 | H-811.x2IHP | H-811.F2 | H-811.S2 |
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**详细参数见规格书
| Motion | Unit | Tolerance | P-561.3CD | P-561.3CL | P-562.3CD | P-562.3CL | P-563.3CD | P-563.3CL | P-561.3DD |
| --- | --- | --- | --- | --- | --- | --- | --- | --- | --- |
| Active axes | | | X | Y | Z | X | Y | Z | X | Y | Z | X | Y | Z | X | Y | Z | X | Y | Z | X | Y | Z |
| Travel range in X | µm | | 100 | 100 | 200 | 200 | 300 | 300 | 45 |
| Travel range in Y | µm | | 100 | 100 | 200 | 200 | 300 | 300 | 45 |
| Travel range in Z | µm | | 100 | 100 | 200 | 200 | 300 | 300 | 15 |
| Travel range in X, open loop, at -20 to 120 V | µm | +20 % / -0 % | 150 | 150 | 300 | 300 | 340 | 340 | 58 |
| Travel range in Y, open loop, at -20 to +120 V | µm | +20 % / -0 % | 150 | 150 | 300 | 300 | 340 | 340 | 58 |
| Travel range in Z, open loop, at -20 to 120 V | µm | +20 % / -0 % | 150 | 150 | 300 | 300 | 340 | 340 | 18 |
| Linearity error in X | % | Max. | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 |
| Linearity error in Y | % | Max. | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 |
| Linearity error in Z | % | Max. | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 | 0.08 |
| Straightness error E_XZ | nm | Typ. | ±30 | ±30 | ±50 | ±50 | ±50 | ±50 | ±20 |
| Straightness error E_YZ | nm | Typ. | ±30 | ±30 | ±50 | ±50 | ±50 | ±50 | ±20 |
| Straightness error E_ZX (flat- ness) | nm | Typ. | ±15 | ±15 | ±20 | ±20 | ±25 | ±25 | ±10 |
| Straightness error E_ZY (flat- ness) | nm | Typ. | ±15 | ±15 | ±20 | ±20 | ±25 | ±25 | ±10 |
| Angular error E_AY (pitch) | µrad | Typ. | ±1 | ±1 | ±2 | ±2 | ±2 | ±2 | ±3 |
| Angular error E_AZ | µrad | Typ. | ±15 | ±15 | ±20 | ±20 | ±25 | ±25 | ±3 |
| Angular error E_BX (pitch) | µrad | Typ. | ±1 | ±1 | ±2 | ±2 | ±2 | ±2 | ±3 |
| Angular error E_BZ | µrad | Typ. | ±15 | ±15 | ±20 | ±20 | ±25 | ±25 | ±3 |
| Angular error E_CX (yaw) | µrad | Typ. | ±6 | ±6 | ±10 | ±10 | ±10 | ±10 | ±3 |
| Angular error E_CY (yaw) | µrad | Typ. | ±6 | ±6 | ±10 | ±10 | ±10 | ±10 | ±3 || Motion | Unit | Tolerance | P-561.3CD | P-561.3CL | P-562.3CD | P-562.3CL | P-563.3CD | P-563.3CL | P-561.3DD |
| --- | --- | --- | --- | --- | --- | --- | --- | --- | --- |
| Active axes | | | X | Y | Z | X | Y | Z | X | Y | Z | X | Y | Z | X | Y | Z | X | Y | Z | X | Y | Z |
| Travel range in X | µm | | 100 | 100 | 200 | 200 | 300 | 300 | 45 |
| Travel range in Y | µm | | 100 | 100 | 200 | 200 | 300 | 300 | 45 |
| Travel range in Z | µm | | 100 | 100 | 200 | 200 | 300 | 300 | 15 |
| Travel range in X, open loop, at -20 to 120 V | µm | +20 % / -0 % | 150 | 150 | 300 | 300 | 340 | 340 | 58 |
| Travel range in Y, open loop, at -20 to +120 V | µm | +20 % / -0 % | 150 | 150 | 300 | 300 | 340 | 340 | 58 |
| Travel range in Z, open loop, at -20 to 120 V | µm | +20 % / -0 % | 150 | 150 | 300 | 300 | 340 | 340 | 18 |
| Linearity error in X | % | Max. | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 |
| Linearity error in Y | % | Max. | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 |
| Linearity error in Z | % | Max. | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 | 0.03 | 0.08 |
| Straightness error E_XZ | nm | Typ. | ±30 | ±30 | ±50 | ±50 | ±50 | ±50 | ±20 |
| Straightness error E_YZ | nm | Typ. | ±30 | ±30 | ±50 | ±50 | ±50 | ±50 | ±20 |
| Straightness error E_ZX (flat- ness) | nm | Typ. | ±15 | ±15 | ±20 | ±20 | ±25 | ±25 | ±10 |
| Straightness error E_ZY (flat- ness) | nm | Typ. | ±15 | ±15 | ±20 | ±20 | ±25 | ±25 | ±10 |
| Angular error E_AY (pitch) | µrad | Typ. | ±1 | ±1 | ±2 | ±2 | ±2 | ±2 | ±3 |
| Angular error E_AZ | µrad | Typ. | ±15 | ±15 | ±20 | ±20 | ±25 | ±25 | ±3 |
| Angular error E_BX (pitch) | µrad | Typ. | ±1 | ±1 | ±2 | ±2 | ±2 | ±2 | ±3 |
| Angular error E_BZ | µrad | Typ. | ±15 | ±15 | ±20 | ±20 | ±25 | ±25 | ±3 |
| Angular error E_CX (yaw) | µrad | Typ. | ±6 | ±6 | ±10 | ±10 | ±10 | ±10 | ±3 |
| Angular error E_CY (yaw) | µrad | Typ. | ±6 | ±6 | ±10 | ±10 | ±10 | ±10 | ±3 |
